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Simultaneous potential and circuit solutions for two-dimensional bounded plasma simulation codes. (English) Zbl 0903.76060
An algorithm is presented which couples external lumped circuit elements to bounded two-dimensional plasma simulation codes. This allows one to decompose the field solver into a Laplace solver (with boundary conditions eventually on applied potentials) and a Poisson solver (with zero boundary conditions). The method is shown on the simulation of a dually excited capacitively coupled RF discharge. The possibility of applications to a plasma processing reactor is also discussed.

76M20 Finite difference methods applied to problems in fluid mechanics
76X05 Ionized gas flow in electromagnetic fields; plasmic flow
Full Text: DOI
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