Edgar, Thomas F.; Hahn, Juergen Process automation. (English) Zbl 1208.93009 Nof, Shimon Y. (ed.), Springer handbook of automation. With DVD. Berlin: Springer (ISBN 978-3-540-78830-0/hbk; 978-3-540-78831-7/ebook). 529-543 (2009). MSC: 93A10 93-03 93C83 PDFBibTeX XMLCite \textit{T. F. Edgar} and \textit{J. Hahn}, in: Springer handbook of automation. With DVD. Berlin: Springer. 529--543 (2009; Zbl 1208.93009) Full Text: DOI
Edgar, Thomas F.; Butler, Stephanie W.; Campbell, W. Jarrett; Pfeiffer, Carlos; Bode, Christopher; Hwang, Sung Bo; Balakrishnan, K. S.; Hahn, J. Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities. (English) Zbl 1077.93524 Automatica 36, No. 11, 1567-1603 (2000). MSC: 93C95 93C83 PDFBibTeX XMLCite \textit{T. F. Edgar} et al., Automatica 36, No. 11, 1567--1603 (2000; Zbl 1077.93524) Full Text: DOI