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Singularly perturbed BVP to estimation of diaphragm deflection in MEMS capacitive microphone: an application of ADM. (English) Zbl 1410.74089

Summary: In this paper, we implement the Adomian decomposition method (ADM) to approximate the deflection of polysilicon diaphragm with small flexural rigidity of micro electro mechanical system (MEMS) capacitive microphone. We prove the existence and the uniqueness of the solution of considered problem with the help of the theory of semi-group. Special attention is given to prove the convergence of the implemented method. Numerical simulation and comparison between the approximate solutions by using the ADM with the variational iteration method are given.

MSC:

74S30 Other numerical methods in solid mechanics (MSC2010)
74F15 Electromagnetic effects in solid mechanics
35B25 Singular perturbations in context of PDEs
35L35 Initial-boundary value problems for higher-order hyperbolic equations
35Q74 PDEs in connection with mechanics of deformable solids
74M25 Micromechanics of solids
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