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Monte Carlo simulation of radio-frequency plasmas in N\(_{2}\). (English) Zbl 1210.78030

Summary: The structure of radio-frequency (rf) discharges in N\(_{2}\) is examined for the electrons and positive ions, in which electron-neutral collisions and ion-neutral collisions are taken into consideration. Some detailed properties of rf plasmas sustained by an rf source voltage of 13.56MHz and an amplitude of 200V are presented using Monte Carlo simulation in electropositive gas (N\(_{2})\). It is shown that most of the rf external electric field is absorbed in the sheath regions, whereas electrons respond easily to the oscillating rf electric field, ions cannot oscillate with the rf electric field. The oscillations of the electron cloud determine the instantaneous sheath thickness near each electrode. The mean energy and the density of charged particles are also discussed.

MSC:

78M32 Neural and heuristic methods applied to problems in optics and electromagnetic theory
82D10 Statistical mechanics of plasmas
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References:

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