Kirkup, S. M.; Wadsworth, M.; Armour, D. G.; Badheka, R.; van den Berg, J. A. Computational solution of the atomic mixing equations. (English) Zbl 0909.65112 Int. J. Numer. Model. 11, No. 4, 189-205 (1998). The purpose of the work described in this paper is the development of a Fortran code for the computational modelling of the atomic mixing and particle emission that takes place when a material is bombarded with energetic particles such as in secondary ion mass spectrometry or secondary neutral mass spectrometry. The methods employed for computing the deposition of the bombarding particles and their energies along with the modelling of the particle field and the surface recession are described. The mixing and surface recession are governed by a set of partial differential equations. A description of the finite element method that is employed for their solution is given. Application to many structures are also presented. Reviewer: T.C.Mohan (Madras) Cited in 1 ReviewCited in 2 Documents MSC: 65Z05 Applications to the sciences 35Q40 PDEs in connection with quantum mechanics 65M60 Finite element, Rayleigh-Ritz and Galerkin methods for initial value and initial-boundary value problems involving PDEs 65Y15 Packaged methods for numerical algorithms 81V10 Electromagnetic interaction; quantum electrodynamics Keywords:atomic mixing equations; Fortran code; particle emission; secondary ion mass spectrometry; secondary neutral mass spectrometry; surface recession; finite element method PDFBibTeX XMLCite \textit{S. M. Kirkup} et al., Int. J. Numer. Model. 11, No. 4, 189--205 (1998; Zbl 0909.65112) Full Text: DOI References: [1] Collins, Nucl. Instrum. Methods 209/210 pp 147– (1983) [2] Jiminez-Rodrigues, Nucl. Instrum. Meth. B2 pp 792– (1984) [3] Collins, J. Appl. Phys. 64 pp 1120– (1988) [4] Wadsworth, Int. J. Numer. Model. 3 pp 157– (1990) [5] Simulation of Depth Resolution Limitations in SIMS Depth Profiling, PhD thesis, University of Salford, 1995. [6] Kirkup, Int. J. Numer. Model. 11 pp 207– (1998) · Zbl 0909.65113 [7] IMPETUS II User Manual, Report MCS-96-10, Department of Computing and Mathematical Sciences, University of Salford, 1996. [8] Zalm, Rep. Prog. Phys. 58 pp 1321– (1995) [9] Biesack, Nucl. Instrum. Methods 174 pp 257– (1980) [10] and , Wiley, 1967. [11] and , Wiley, 1980. [12] Numerical Analysis Report 13/90, Department of Mathematics, University of Reading, Whiteknights, Reading, England RG6 2AX, 1990. This reference list is based on information provided by the publisher or from digital mathematics libraries. Its items are heuristically matched to zbMATH identifiers and may contain data conversion errors. In some cases that data have been complemented/enhanced by data from zbMATH Open. This attempts to reflect the references listed in the original paper as accurately as possible without claiming completeness or a perfect matching.