Valiev, K. A.; Zeyfarth, H.; Il’kayev, D. R.; Makhviladze, T. M. Modelling and optimization of the optical schemes of photolithography systems. (Russian. English summary) Zbl 0974.78500 Mat. Model. 2, No. 1, 56-75 (1990). MSC: 78A10 Physical optics PDFBibTeX XMLCite \textit{K. A. Valiev} et al., Mat. Model. 2, No. 1, 56--75 (1990; Zbl 0974.78500) Full Text: MNR