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Uniformity of electron-cyclotron-resonance microwave plasma treatment in nonuniform external magnetic fields. (English. Russian original) Zbl 0924.76113
Phys.-Dokl. 42, No. 3, 121-124 (1997); translation from Dokl. Akad. Nauk, Ross. Akad. Nauk 353, No. 1, 40-43 (1997).
The electron concentration is calculated for a magnetized cylindrical plasma in a microwave gas discharge under conditions that allow electron-cyclotron resonance to appear. The corresponding nonlinear Fokker-Planck equation is solved for several positions of the resonance which also acts as a source of ionization. Obtained electron concentration distributions are analyzed with respect to applicability to plasma treatment of materials.
MSC:
76X05 Ionized gas flow in electromagnetic fields; plasmic flow
78A55 Technical applications of optics and electromagnetic theory
82D10 Statistical mechanical studies of plasmas
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