Gulyaev, Yu. V.; Cherkasov, I. D.; Yafarov, R. K. Uniformity of electron-cyclotron-resonance microwave plasma treatment in nonuniform external magnetic fields. (English. Russian original) Zbl 0924.76113 Phys.-Dokl. 42, No. 3, 121-124 (1997); translation from Dokl. Akad. Nauk, Ross. Akad. Nauk 353, No. 1, 40-43 (1997). The electron concentration is calculated for a magnetized cylindrical plasma in a microwave gas discharge under conditions that allow electron-cyclotron resonance to appear. The corresponding nonlinear Fokker-Planck equation is solved for several positions of the resonance which also acts as a source of ionization. Obtained electron concentration distributions are analyzed with respect to applicability to plasma treatment of materials. Reviewer: Vladimir Čadež (Gent) MSC: 76X05 Ionized gas flow in electromagnetic fields; plasmic flow 78A55 Technical applications of optics and electromagnetic theory 82D10 Statistical mechanical studies of plasmas Keywords:Fokker-Planck equation; microwave gas discharge; electron concentration distribution; ionization PDF BibTeX XML Cite \textit{Yu. V. Gulyaev} et al., Phys.-Dokl. 42, No. 3, 121--124 (1997; Zbl 0924.76113); translation from Dokl. Akad. Nauk, Ross. Akad. Nauk 353, No. 1, 40--43 (1997)